Hybrid impedance matching for inductively coupled plasma system

ABSTRACT

In one aspect, a system includes a generator configured to generate and tune a frequency of a supply signal. The system includes an auto-matching network configured to receive the supply signal and to generate an impedance-matched signal for use in powering a plasma system. In some implementations, during a first stage of an impedance matching operation, the generator is configured to tune the frequency of the supply signal until the generator identifies a frequency for which the reactance of the generator and the reactance of the load are best matched. In some implementations, during a second stage of the impedance matching operation, the auto-matching network is configured to tune a tuning element within the auto-matching network until the auto-matching network identifies a tuning of the tuning element for which the resistance of the generator and the resistance of the load are best matched.

PRIORITY INFORMATION

This application is a Continuation of, and claims priority to, U.S. patent application Ser. No. 13/648,183 by Thomas et al., filed 9 Oct. 2012, and titled HYBRID IMPEDANCE MATCHING FOR INDUCTIVELY COUPLED PLASMA SYSTEM, which is hereby incorporated by reference herein in its entirety and for all purposes.

FIELD OF THE INVENTION

The present disclosure relates generally to impedance matching, and more specifically, to a hybrid impedance matching operation for an inductively coupled plasma system that includes both a frequency tuning operation as well as an auto-matching operation.

BACKGROUND

An inductively coupled plasma (ICP) system can be used in a variety of microfabrication processes including substrate cleaning processes, surface conditioning processes, thin film deposition processes, etching processes, and cleaning processes, among other applications. In an ICP system, a generator supplies a radio frequency (RF) supply signal to an induction coil. The supply signal generates time-varying magnetic fields around the induction coil that then create electric currents through a process gas by way of electromagnetic induction. The electric currents supply the energy to generate the plasma from the process gas. An impedance matching network can be used to facilitate the transfer of power from the supply signal generator to the induction coil of the ICP system and thereby facilitate the formation of the plasma while minimizing the wasted reflected power and potentially reducing the risk of damage to a device being fabricated in the ICP system as well as damage to the ICP system components themselves.

SUMMARY

In one aspect of the subject matter described in this disclosure, a system includes a generator configured to generate a supply signal and to tune a frequency of the supply signal within a tuning range. The system also includes an auto-matching network configured to receive the supply signal and to generate an impedance-matched signal based on the supply signal as modified by the impedance of the plasma system and the impedance of the auto-matching network. A plasma system is configured to receive the impedance-matched signal. The impedance-matched signal supplies power to the plasma system for one or more plasma-facilitated processes. In some implementations, during a first stage of an impedance matching operation, the generator is configured to tune the frequency of the supply signal until the generator identifies a frequency for which the reactance of the generator and the reactance of the load on the generator are best matched for the tuning range. In some implementations, during a second stage of the impedance matching operation, the auto-matching network is configured to tune a tuning element within the auto-matching network until the auto-matching network identifies a tuning of the tuning element for which the resistance of the generator and the resistance of the load on the generator are best matched for the identified frequency.

In some implementations, the generator is configured to generate and output the supply signal in forward power mode. In some implementations, the supply signal is a radio frequency (RF) signal. In some implementations, the generator is configured to generate the supply signal at frequencies below 1 MHz, and in some such implementations, the generator is configured to tune the frequency of the supply signal within a range that starts at approximately 380 kHz and which stops at approximately 440 kHz. In some implementations, to identify the frequency for which the reactance of the generator and the reactance of the load on the generator are best matched, the generator is configured to identify the frequency of the supply signal for which the generator detects or determines there is the least power reflected back to the generator from the load on the generator. In some implementations, the first stage of the impedance matching operation includes a first coarse tuning operation followed by a second fine tuning operation.

In some implementations, the auto-matching network further includes a phase and magnitude detector configured to detect a phase and magnitude of the supply signal, and to generate phase and magnitude error correction signals based on the detected phase and magnitude. In some implementations, the phase and magnitude detector is further configured to detect a phase and magnitude of a signal reflected back from the plasma system. In some implementations, the auto-matching network further includes a controller configured to receive the phase and magnitude error correction signals, and to generate a tuning signal based on the phase and magnitude error correction signals. In some implementations, the tuning element is configured to receive the tuning signal, which then effects a change in the impedance of the tuning element based on the tuning signal. In some implementations, the tuning element is a variable capacitor, and the tuning signal changes a capacitance of the variable capacitor. In some implementations, to tune the tuning element within the auto-matching network until the auto-matching network identifies a tuning of the tuning element for which the resistance of the generator and the resistance of the load on the generator are best matched, the auto-matching network is configured to tune the tuning element until one or both of the phase and magnitude error correction signals are substantially zero or are below certain thresholds.

In some implementations, the first and second stages of the impedance matching operation are performed in real time. In some implementations, the first and second stages of the impedance matching operation are performed at each transition between process steps of a multi-step process. In some implementations, the performance of the second stage of the impedance matching operation does not begin until the first stage of the impedance matching operation identifies the frequency for which the reactance of the generator and the reactance of the load on the generator are best matched.

In some implementations, the plasma system is an inductively coupled plasma (ICP) system and the auto-matching network delivers the impedance-matched signal to an induction coil of the ICP system.

In another aspect of the subject matter described in this disclosure, a method includes generating, by a generator, a supply signal for use in powering a plasma system. The method also includes tuning, by the generator, a frequency of the supply signal within a tuning range until the generator identifies a frequency for which the reactance of the generator and the reactance of the load on the generator are best matched within the tuning range. The method further includes tuning, by an auto-matching network, a tuning element within the auto-matching network until the auto-matching network identifies a tuning of the tuning element for which the resistance of the generator and the resistance of the load on the generator are best matched for the identified frequency. In some implementations, the auto-matching network is configured to receive the supply signal and to supply an impedance-matched signal to the plasma system, the impedance-matched signal supplying power to the plasma system for one or more plasma-facilitated processes. The impedance-matched signal is based on the supply signal as modified by the impedance of the plasma system and the impedance of the auto-matching network including the impedance of the tuning element.

In some implementations, the generator is configured to generate and output the supply signal in forward power mode. In some implementations, the supply signal is a radio frequency (RF) signal. In some implementations, the generator is configured to generate the supply signal at frequencies below 1 MHz. In some such implementations, the generator is configured to tune the frequency of the supply signal within a range that starts at approximately 380 kHz and which stops at approximately 440 kHz. In some implementations, tuning a frequency of the supply signal until the generator identifies a frequency for which the reactance of the generator and the reactance of the load on the generator are best matched, comprises tuning the frequency of the supply signal until the generator detects or determines there is the least power reflected back to the generator from the load on the generator. In some implementations, the tuning of the frequency of the supply signal includes a first coarse tuning operation followed by a second fine tuning operation.

In some implementations, tuning a tuning element within the auto-matching network until the auto-matching network identifies a tuning of the tuning element for which the resistance of the generator and the resistance of the load on the generator are best matched, comprises: detecting one or both of a phase and a magnitude of the supply signal; generating one or more phase error corrections signals and/or one or more magnitude error correction signals based on the detected phase and magnitude; and generating a tuning signal for tuning the tuning element based on one or both of the phase and magnitude error correction signals. In some implementations, the tuning element is configured to receive the tuning signal, which then effects a change in the impedance of the tuning element based on the tuning signal. In some implementations, the tuning element is a variable capacitor, and wherein tuning the tuning element with the tuning signal comprises changing a capacitance of the variable capacitor. In some implementations, tuning the tuning element within the auto-matching network until the auto-matching network identifies the tuning of the tuning element for which the resistance of the generator and the resistance of the load on the generator are best matched comprises tuning the tuning element until one or both of the phase and magnitude error correction signals are substantially zero or are below certain thresholds.

In some implementations, the tuning of the frequency of the supply signal by the generator and the tuning of the tuning element by the auto-matching network are performed in real time. In some implementations, the tuning of the frequency of the supply signal by the generator and the tuning of the tuning element by the auto-matching network are performed at each transition between process steps of a multi-step process. In some implementations, the tuning by the auto-matching network does not begin until the tuning of the frequency of the supply signal results in the identification of the frequency for which the reactance of the generator and the reactance of the load on the generator are best matched.

In some implementations, the method further includes performing a network analysis operation to identify one or more resonance points that should not be tuned to or tuned over during the tuning of the frequency of the supply signal. In some implementations, the plasma system is an inductively coupled plasma (ICP) system and wherein the auto-matching network delivers the impedance-matched signal to an induction coil of the ICP system.

These and other aspects are described further below with reference to the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a schematic depiction of an example inductively coupled plasma (ICP) system suitable for use in conjunction with various embodiments.

FIG. 2 shows a block diagram depiction of an example ICP system suitable for use in conjunction with various embodiments.

FIG. 3 shows a flowchart illustrating an example impedance matching process.

FIG. 4 shows a flowchart illustrating an example initialization and synchronization process.

DETAILED DESCRIPTION

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the presented embodiments. The disclosed embodiments may be practiced without some or all of these specific details. In other instances, well-known process operations have not been described in detail to not unnecessarily obscure the disclosed embodiments. While the disclosed embodiments will be described in conjunction with the specific embodiments, it will be understood that it is not intended to limit the disclosed embodiments.

An inductively coupled plasma (ICP) system can be used in a variety of semiconductor device fabrication and other microfabrication processes including substrate cleaning processes, metal cleaning processes, surface conditioning processes, thin film deposition (e.g., sputtering) processes, etching (e.g., reactive-ion etching) processes, and chamber cleaning processes, among other applications. For example, an ICP system-generated plasma can be used to clean a substrate prior to deposition of a tungsten nucleation layer or to remove metal oxide from metal contacts. FIG. 1 shows a schematic depiction of an example ICP system 100 suitable for use in conjunction with various embodiments. The ICP system 100 includes a reaction chamber 102 in which the plasma is generated and in which the fabrication, cleaning, or other plasma-enhanced or plasma-facilitated processes are performed. In some embodiments, the reaction chamber 102 is surrounded by a hemispheric dome 104. In some such implementations, the hemispheric dome 104 can be formed of a ceramic material. An induction coil 106 is wound outside the dome 104. For example, the induction coil can be formed of copper or another highly conductive material. In some implementations, the coil is hollow allowing for the passage of a coolant such as water within the coil.

The induction coil 106 is supplied by a generator 108. In some implementations, the generator 108 is a medium frequency RF (MFRF) generator. The medium frequency range generally refers to radio frequencies in the range of 300 kilo-Hertz (kHz) to 1 Mega-Hertz (MHz). During operation, the generator 108 generates an RF alternating current (AC) supply signal that is supplied to the induction coil 106. In some implementations, the generator 108 is configured to generate a supply signal having a frequency below approximately 2 MHz, and in some even more specific implementations, below 1 MHz. In some specific applications, the generator 108 is configured to generate a supply signal having a frequency in the range of approximately 330 kHz to approximately 460 kHz. The generator 108 delivers the supply signal to the induction coil 106 via an impedance matching network 110, as described further below with respect to FIGS. 2-3. Additionally, in some embodiments, the ICP system 100 can include a plurality of induction coils, each of which may be connected to a different generator by way of a different matching network.

Within the reaction chamber 102, a wafer pedestal 112 supports a substrate 114. For example, the substrate 114 can be a semiconductor wafer or a glass or other dielectric substrate. The pedestal 112 typically includes a chuck (sometimes referred to as a clamp) to hold the substrate 114 in place during processing. The chuck may be an electrostatic chuck, a mechanical chuck or various other types of chuck suitable for use in the industry and/or research. A heat transfer subsystem including a line 115 for supplying heat transfer controls the temperature of substrate 114. The wafer chuck and heat transfer system can facilitate maintaining the appropriate wafer or other substrate temperatures.

In some implementations, the ICP system 100 additionally includes a high frequency RF (HFRF) generator 116. For example, the HFRF generator 116 can be used to electrically bias the substrate 114. Additionally, the HFRF generator 116 can be used to draw charged species to the substrate 114 during one or more process steps. Electrical energy from the HFRF generator 116 can be supplied to the substrate 114 via an electrode or through capacitive coupling, for example. In some other implementations, the generator 116 can be configured to supply a bias in another frequency range less than or greater than RF frequencies. In some other implementations, the generator 116 can be configured to supply a DC bias.

During operation, one or more process gases, such as argon (Ar), hydrogen (H), or nitrogen (N), among other examples, are introduced via one or more inlets 118. It is the process gas or gases that will be transformed to the plasma state of matter by the ICP system 100. In various applications, the process gases may or may not be premixed. In some implementations, the process gases can be introduced through a gas supply inlet mechanism including orifices. Some of the orifices can orient the process gas or gases along an axis of injection intersecting an exposed surface of the substrate 114 at an acute angle. In some other implementations, the gas or gas mixtures can be introduced from a primary gas ring 120. In various applications, the gas ring 120 can direct the gas toward the surface of the substrate 114. For example, injectors can be connected to the primary gas ring 120 to direct at least some of the gas or gas mixtures into the chamber 102 and toward the substrate 114. In some implementations, process gases exit the chamber 102 via an outlet 122. A vacuum pump (e.g., a turbomolecular pump) typically draws process gases out and maintains a suitably low pressure within the reaction chamber 102.

In one example of a plasma-facilitated process step, the ICP system 100 is configured to pre-treat a semiconductor wafer substrate 114. For example, the semiconductor wafer substrate 114 can include a hole in a dielectric layer exposing a nickel (Ni) or other metal contact. Such a pre-treatment can be performed prior to deposition of a tungsten nucleation layer in the hole. In one example implementation of an ICP-facilitated multi-step pre-treatment, the ICP system 100 is configured to perform four process steps or phases: (1) ignition of the plasma using an Ar gas flow; (2) cleaning or removing the oxide on the Ni contact using a combined Ar and hydrogen (H₂) flow; (3) enhancing adhesion to the dielectric hole sidewall using a combined nitrogen (N₂) and H₂ flow; and (4) extinguishing of the plasma.

Each transition from one process step, phase or stage to the next can and generally does cause the impedance of the load on the generator 108 to change. By way of background, the impedance Z can be a complex number having a real component (the resistance) and an imaginary part (the reactance). For example, the impedance can be written in Cartesian form as Z=R+jX, where R is the resistance and X is the reactance. Thus, each transition from one process step or stage to the next can cause both the resistance and the reactance of the load on the generator 108 to change. Indeed, any change in any of the power or frequency of the supply signal, any changes in the gases flowing in the chamber 102, or other changes in the reaction chamber 102 will generally cause a change in one or both of the resistance and the reactance of the load. Generally, an impedance matching network is used to match the impedance of the source Z_(S) to the impedance of the load Z_(L).

Embodiments of the present disclosure relate to an impedance matching network for maximizing the power transfer from a source, such as the generator 108, to a load, such as the induction coil 106 and other ICP system 100 components including the process gas or gases. Although the invention is not limited to embodiments that utilize a system such as the ICP system 100 described and illustrated with reference to FIG. 1, for convenience of describing example embodiments in the following description, reference may be made generally to the components of ICP system 100. Maximum power transfer from the source to the load is achieved when Z _(S) =Z _(L)*, where Z_(L)* is the complex conjugate of Z_(L). The impedance matching network also can minimize reflections from the load. Minimum reflection is achieved when Z _(S) =Z _(L).

The impedance matching network 110 is disposed between the generator 108 and the induction coil 106 and, at a high level, is configured to match an impedance of the load the supply signal drives with an impedance of the generator 108 that generates the supply signal. As described above, the impedance of the load includes, for example, impedance contributions from the induction coil 106, the gas flowing in the chamber 103, and the impedance from the matching network 110 itself, among other possible contributions, some or all of which are dependent on the frequency and power level of the supply signal from the generator 108. The matching network 110 ideally functions to compensate for the difference between the resistance of the generator 108 and the resistance of the load, and to compensate for the difference between the reactance of the generator 108 and the reactance of the load.

Traditionally, impedance matching networks include elements such as capacitors. So-called auto-matching networks include tuning elements such as, for example, variable vacuum capacitors. Auto-matching networks ideally adjust their own resistance and reactance by way of varying the capacitance of a capacitor in response to a feedback signal such that the impedance of the combined load—with the matching network connected—is the complex conjugate of the impedance of the source—the generator. Generally, the size of the components, especially the capacitors, required for a given supply signal frequency is inversely proportional to the frequency. So, as lower frequencies are desired for certain processes, the components required generally must be large. One reason for this is because ICP generators operating at low or medium frequencies also typically generate high voltages. For example, low or medium frequency processes can include cleaning processes that use particular species so as to avoid damage to the substrate or devices fabricated or to be fabricated on the substrate. To accommodate the high voltages, traditional ICP systems require components rated for both high voltages and rated for low or medium frequencies. Generally, capacitors having high capacitances are required for such applications. Commercially, it is difficult to produce variable vacuum capacitors that can operate at low or medium frequencies, such as below 1 MHz, and more specifically at around approximately 400 kHz, with the high capacitances required because of the size generally required of such devices. Thus, traditionally, fixed impedance matching networks have been used with low or medium frequency ICP generators. In contrast, at frequencies above, for example, approximately 2 MHz, variable impedance auto-matching networks have been utilized.

Because the impedance of a fixed matching network is fixed, it can only provide the best impedance matching for one particular load impedance, and hence for one process step “recipe” (e.g., including the power and frequency of the supply signal, the gas mixture, the gas flow rate, the temperature, the pressure, and/or other specified conditions in the reaction chamber). However, in multi-step process flows, as the impedance of the load changes from the one process step for which the fixed impedance matching network is designed to a different process step or condition having a different impedance, the power transfer from the generator to the induction coil is reduced and the reflected power increases. Some traditional fixed matching networks are configured to match to an impedance value between the impedance values associated with two different process steps. While this may provide a coarse solution for certain applications, the power reflected during each of the two process steps is often too much for other applications. Additionally, some applications may require three or more process steps, each of which may have a different recipe, making such traditional solutions even less effective. Additionally, there are also transient voltage and power spikes associated with the transition between process steps or phases; that is, in addition to the power reflected as a result of a steady-state impedance mismatch. For example, even in single process step applications, there are power spikes in igniting the plasma and in transitioning from the plasma ignition phase to a steady-state process step phase. In addition to wasting energy and possibly damaging the generator or other ICP system components, power spikes can result in damage to the substrate and any devices fabricated or to be fabricated on the substrate.

Additionally, ICP system generators are typically designed to operate at certain impedances—for example, 50 Ohms (Ω). However, because the impedance of the generator also is generally a function of one or both of the frequency of the supply signal and the power in the supply signal the generator 108 is supplying, ICP generators running at low or medium frequencies, such as around approximately 400 kHz, may not operate at 50Ω. As a result, when an ICP system transitions from plasma ignition to a steady-state flow or as the ICP systems transitions through various process steps or phases of operation, such as the ICP-facilitated multi-step pre-treatment described above, there can be impedance changes on both the source (generator) side and the load side resulting in the development of high voltages and power spikes.

In summary, because traditional ICP systems that operate at low or medium frequencies (e.g., less than 2 MHz in some implementations, less than 1 MHz is some more specific implementations, and in the range of approximately 330 kHz to approximately 460 kHz in some even more specific implementations) require large capacitors and other components, and because variable versions of such components are not commercially available, fixed matching networks have traditionally been used. Because fixed matching networks are only able to match the source impedance to the load impedance for one limited system impedance, such fixed matching networks can only offer suitably low reflected power for a small load impedance range. Generally, the reflected power increases and the percentage of power delivered to the induction coil for a given power supplied by the generator decreases as the impedance mismatch between the source and the load increases. Thus, traditional ICP systems typically run in delivered-power mode to ensure that enough power is delivered to the induction coil to meet the process step requirements. In delivered-power mode, the generator delivers the same power in the supply signal to the induction coil regardless of the power reflected and detected by the generator. For example, to supply the power for a process that requires 2000 Watts (W), a generator in delivered power mode may have to supply significantly more than 2000 W. More specifically, because of an impedance mismatch between the generator and the load, the load may be reflecting, for example, 500 W, thus requiring the generator to output 2500 W in delivered power mode to compensate for the 500 W of reflected power. However, although the required power may actually be delivered to the load, as described above, at low or medium frequencies, particularly around 400 kHz, the transient power spikes and voltages at transition points between process steps can cause damage to the substrate or devices fabricated on the substrate as well as to the generator or other components of the ICP system.

In contrast, in forward power mode, the generator outputs a steady fixed power supply signal V_(S) regardless of the power reflected. Thus, a generator that, for example, outputs 2000 W in forward power mode, of which 200 W (10%) is reflected, only delivers 1800 W to the ICP system. Currently there does not exist a commercially available auto-matching network for an ICP generator operating at low or medium frequencies in forward power mode that can keep the reflected power low enough to meet various specification requirements. For example, some device manufacturers desire that the reflected power stays under 2%—for example, less than 30 W reflected power for a 2000 W forward power supply signal—for every process step and during the transitions between process steps. However, typical reflected power measurements are in the range of approximately 5% to 10% or higher for traditional ICP systems generating low or medium frequency supply signals. Additionally, transient conditions can result in sharp increases in the reflected power and in power spikes delivered to the ignition coil.

Various embodiments utilize one or more tuning elements in an auto-matching network as well as the frequency tuning capabilities of an ICP generator to perform a two-stage impedance matching operation. More specifically, various embodiments advantageously utilize the frequency tuning (or dithering) capabilities of the ICP generator 108 to adjust the reactance the imaginary part of the impedance (the frequency tuning may in some instances also affect the resistance). Various embodiments also advantageously utilize the tuning element(s) in an auto-matching network 110 to adjust the resistance—the real part of the impedance (the auto-matching network may in some instances also affect the reactance). Another aspect of the present disclosure concerns synchronizing the frequency tuning operations of the generator 108 with the capacitive (or other) tuning capabilities of the auto-matching network 110.

FIG. 2 shows a block diagram depiction of an example ICP system 200 suitable for use in conjunction with various embodiments. The ICP system 200 includes an ICP plasma chamber 202 including a conduction coil 206. The ICP system 200 further includes a medium frequency RF generator 208 configured to generate a supply signal V_(S) and to tune a frequency of the supply signal V_(S) within a range of frequencies. In some particular embodiments, the generator 208 is configured to generate a supply signal V_(S) having a frequency within a range of approximately 330 kHz to approximately 460 kHz. The generator 208 is configured to output the supply signal V_(S) in forward power mode; that is, at a fixed output power. An auto-matching network 210 receives the supply signal V_(S) and delivers an impedance-matched signal V_(L) to the induction coil 206. The generator 208 is further configured to detect (or otherwise determine based on one or more sensors or other feedback mechanisms) the forward power output from the generator as well as the power reflected back to the generator from the load. In some implementations, the generator 208 can have its own control loop that enables it to detect the power output from the generator as well as the power reflected back to the generator.

In some embodiments, the auto-matching network 210 includes a phase and magnitude detector 224 that is configured to detect a phase and a magnitude (e.g., voltage and/or power) of the forward power supply signal V_(S) before passing the supply signal to a tuning element 226 within the auto-matching network. In some embodiments, the phase and magnitude detector is further configured to detect the phase and magnitude (e.g., voltage and/or power) of any signals reflected from the induction coil 206. In some example implementations, the phase and magnitude detector 226 is configured to sample the supply signal V_(S) and any reflected signals at a sampling frequency in the range of approximately 100 Hz to 1 kHz. The phase and magnitude detector 224 sends phase and magnitude error correction signals to a controller 228. Based on the phase and magnitude error correction signals, the controller 228 generates and sends a tuning signal to the tuning element 226. The tuning signal causes one or more characteristics of the tuning element 226 to change in order to effect a change in the impedance of the auto-matching network 210 such that the impedance of the load on the generator 208 is matched as closely as possible to the impedance of the generator 208. In some implementations, as described below, the tuning element 226 of the auto-matching network is configured to only, or primarily, effect a change in the real part of the impedance—the resistance. In some implementations, when the phase and magnitude error correction signals are zero the impedance, or at least the resistance, of the load is fully matched to the impedance of the generator 208. In some implementations, the tuning element 226 is a variable capacitor, such as a variable vacuum capacitor, having the capacitance, voltage, and frequency characteristics to be suitable for use with the low or medium frequency supply signals required for certain ICP-facilitated processes. In such implementations, the controller 228 sends the tuning signal to the variable capacitor 226 to effect a change in the capacitance of the variable capacitor. The resultant impedance-matched signal V_(L) delivered to the induction coil 206 is a function of the supply signal V_(S) as modified by the impedance of the load as seen at the induction coil as well as the impedance contribution from the auto-matching network 210, which is a function of the properties of the tuning element (e.g., the capacitance of a variable capacitor) 226, and in some implementations, as well as a function of the capacitance of a static capacitor 230.

FIG. 3 shows a flowchart illustrating an example impedance matching process 300. For example, the process 300 can be practiced with the ICP system 200 described with reference to FIG. 2. In some implementations, in block 302, the generator 208 is initialized with a frequency tuning range and a forward power level. In one example implementation, the frequency tuning range includes a starting or minimum frequency of 380 kHz and a stop or maximum frequency of 440 kHz. In some implementations, the generator 208 is configured for both initial course tuning as well as fine tuning after the coarse tuning is performed. For example, in one implementation, the course tuning is performed in tuning increments of 1 kHz steps while the fine tuning is performed in, for example, tuning increments of 100 Hz steps. In one example application, the power level can be approximately 2000 W. Next, in block 304, the process gas flow begins in the ICP chamber 202. For example, the process gas used for ignition can be Ar. In one implementation, there is an initial Ar burst at a chamber pressure of, for example, 50 milli-Torr (mT) to achieve plasma ignition. After ignition as the ICP chamber enters a steady-state phase, the Ar flow is lowered and the pressure in the ICP chamber is reduced to, for example, less or much less than 50 mT. In other general applications of the process 300, block 304 may generally signify or be characterized by any change in the process recipe, such as from ignition to steady-state, as just described, or such as between process steps or phases. Thus, in various embodiments, the process 300 is capable of being performed, and indeed intended to be performed, in real-time and at each transition from one phase or process step to the next.

In block 306, the generator 208 generates and outputs, in forward power mode, a supply signal V_(S) having the starting frequency and the specified power. In some embodiments, the generator 208 then begins a frequency tuning operation in block 308. In one example implementation, the frequency tuning operation of block 308 begins immediately after the generator 208 outputs the supply signal V_(S). As described above, in some implementations, the frequency tuning operation of block 308 includes a first coarse tuning operation followed by a more fine tuning operation when the it is determined that the coarse tuning operation has completed. In the coarse tuning portion of the frequency tuning operation, the generator 208 incrementally changes the frequency of the supply signal V_(S) in the specified increments (e.g., 1 kHz) beginning at the specified starting frequency and continuing up to a maximum at the specified stop frequency. As the generator 208 is tuning the frequency of the supply signal V_(S), the generator is also detecting the reflected power in block 310. Although block 310 is shown as occurring after block 308, it is to be understood that block 310 may occur simultaneously, concurrently, or otherwise in parallel with block 308. In some example implementations, the generator 208 is configured to sample the supply signal V_(S) and any reflected signals at a sampling frequency in the range of approximately 100 Hz to approximately 1 kHz during the operation of the ICP system 200, or at least during the tuning and detecting operations of blocks 308 and 310.

In particular implementations, the generator 208 is configured to continue the tuning and detecting operations of blocks 308 and 310, potentially increasing the frequency of the supply signal V_(S) up to a maximum of the stop frequency, followed by potentially decreasing the frequency of the supply signal V_(S) back down to a minimum of the starting frequency or to a midpoint in between, and potentially performing one or more additional iterations of increasing and decreasing the frequency, until the generator 208 identifies a particular frequency increment or range—in this example a 1 kHz range—for which the generator detects the minimum amount of reflected power (all other conditions being constant). In implementations in which the tuning operation in block 308 includes both coarse tuning as well as fine tuning, the generator 208 can then begin iterations of fine tuning within the 1 kHz incremental range identified with the coarse tuning operation. For example, as described above, such fine tuning increments can be 100 Hz increments. The fine tuning operation can proceed in a similar fashion as the coarse tuning operation, but with the smaller (e.g., 100 Hz) tuning increments and within the smaller 1 kHz frequency range (or perhaps shortly therearound as well). The fine tuning operation in block 308 and detection in block 310 proceeds until the generator 208 identifies, in block 312, a particular frequency for which the generator detects the minimum amount of reflected power (all other conditions being constant).

Because many of the impedance contributions are frequency dependent, as the generator 208 tunes the frequency of the supply signal V_(S), the impedance of the load varies with the tuning of the frequency. For example, in implementations in which the tuning element 226 is or includes a variable capacitor, as the generator 208 tunes the frequency of the supply signal V_(S), the variable capacitor reacts to the frequency changes and the impedance contribution from the tuning element 226 changes. Because the power reflected back from the load to the generator 208 increases as the impedance mismatch between the generator and the load increases, and because the impedance of the load is a function of the frequency and often also the power of the supply signal V_(S), the generator is able to determine empirically during the tuning operation in block 308 whether further increases or decreases in the frequency of the supply signal V_(S) will result in more or less power being reflected, and subsequently, to tune the frequency in the direction that results in less power being reflected. In this matter, after one or more iterations, the generator 208 is able to identify, in block 312, the frequency for which the reflected power is minimized.

By performing the tuning, detecting, and frequency identifying operations of blocks 308, 310, and 312, the generator 208 is effectively, or inherently, functioning to identify the frequency of the supply signal V_(S) that causes, or results in, the best impedance matching between the load and the generator for a given auto-matching network configuration and for a given process recipe. In particular, by performing the tuning, detecting, and frequency identifying operations of blocks 308, 310, and 312, the generator 208 is functioning to identify, in real time, the frequency of the supply signal V_(S) that causes, or results in, the best match of the imaginary part of the impedance (the reactance) of the load with the imaginary part of the impedance (the reactance) of the generator. Ideally, the generator 208 identifies a frequency of the supply signal V_(S) that results in a cancellation of the reactance of the generator by the reactance of the load (because the impedance of the load should be the complex conjugate of the impedance of the generator when the impedances are fully matched for maximum power transfer). The generator 208 then sets or locks in the frequency of the supply signal V_(S) to the identified frequency for the current process step or phase.

In various implementations, after identifying or determining the frequency that results in the best match of the reactance in block 312, the auto-matching network 210 then performs, in block 314, a second tuning operation. In block 314, the auto-matching network 210 tunes the tuning element 226—for example, by changing the capacitance of a variable capacitor of the tuning element—in order to effect a change in the impedance of the load. In some implementations, the auto-matching network 210 tunes (e.g., varies the capacitance of) the tuning element 226 to effect a change in the real part of the impedance of the load—the resistance of the load. Ideally, the auto-matching network 210 tunes the tuning element 226 until the resistance of the load matches the resistance of the generator 208. As described above, in some example implementations, such matching occurs when the phase and magnitude error correction signals from the phase and magnitude detector 226 are zero. When the phase and magnitude error correction signals are zero, the controller 228 sends (or is already sending at that point) the tuning signal to the tuning element 226 that results in the best matching of the impedance of the load to the impedance of the generator 208. As described above, the frequency tuning operation 308 serves primarily to match the reactance while the (e.g., capacitance) tuning operation of block 314 serves primarily to match the resistance.

Although block 314 is shown as occurring after blocks 308, 310, and 312, in actual practice, block 314 may begin at approximately the same time as block 308. However, although the tuning operation of the auto-matching network may be started when block 308 begins, because the auto-matching network 210 generally includes an electromechanical tuning element 226 or one or more other devices that take relatively longer to respond as compared with the frequency tuning, detecting, and identifying operations of blocks 308, 310, and 312, the effect of the tuning operation of the auto-matching network 210 in block 314 may not be realized until after block 312 is finished. This latency in the auto-matching network 210 can be exploited here to allow the tuning, detecting, and identifying operations of blocks 308, 310, and 312 to finish before the auto-matching network effects changes in the impedance of the auto-matching network by way of the tuning element 226. Thus, while the generator 208 is tuning the frequency of the supply signal so as to achieve the minimum power reflection, the auto-matching network is preparing to adjust the real part of the impedance. In this sense, the auto-matching network 210 can be said to perform a “half auto-match” because it responds and adjusts the real part of the impedance only (or primarily), and only (or primarily) after the imaginary part of the impedance is adjusted by the generator 208. In some implementations, an intentional delay is actually introduced between when the frequency tuning operation of block 308 begins and when the auto-matching tuning operation of block 314 begins. Such a delay can be intentional set by delaying, adjusting, or slowing one or more control signals such as those used to control the electromechanical elements of the auto-matching network 210. This ensures that the frequency tuning operation of block 308 can complete prior to the start of the auto-matching tuning operation of block 314.

As described above, in some implementations, the process 300 is performed during or immediately after any change in the process recipe. In this way, various embodiments provide real-time impedance matching of both the imaginary (reactance) component, solely or primarily by way of frequency tuning in the generator 208, as well as the real (resistance) component, solely or primarily by way of the auto-matching network 210, during or immediately after any process step or other phase transition in a single or multi-process step ICP plasma-facilitated treatment.

Using the aforementioned process 300 in conjunction with an auto-matching network (such as auto-matching network 210) and a generator (such as generator 208) configured to output a 2000 W supply signal V_(S) in forward power mode, the inventors have achieved less than 1% reflected power (e.g., less than 15 W). Specifically, the inventors have achieved a reflected power that reaches a maximum of 6 W during process step transitions using a supply signal V_(S) generated with a frequency of 405.9 kHz at 1999 W forward power.

While the process 300 described above was described as having a particular frequency tuning range—a starting frequency of 380 kHz, a stop frequency of 440 kHz, and coarse and fine tuning increments of 1 kHz and 100 Hz, respectively—other frequency ranges and tuning increments may be desirable or even required in other applications. One reason for pre-identifying a tuning range is that the ICP generators generally have multiple resonance points. If the generator reaches one of these resonance points during the frequency tuning operation in block 308, the generator (e.g., the control loop of the generator) may become lost and not be able to iteratively identify the frequency for which minimum power reflection is achieved. Thus, before process 300 is performed, appropriate boundary conditions (e.g., the starting and stop frequencies) may desirably be determined such that the generator will not tune the frequency below a specified starting frequency or above a specified stop frequency to ensure that the frequency tuning operation doesn't encompass tuning near or over such resonance points. Generally, the boundary conditions will vary be application (e.g., process recipe). In one example implementation, a network analyzer is used to identify the impedances of the resonance points that are to be avoided such that the generator is able to identify and lock onto a frequency for which minimum power reflection occurs.

FIG. 4 shows a flowchart illustrating an example initialization and synchronization process 400. The process 400 can be performed, for example, by a user at various times such as, for example, when configuring a generator 208 with a particular ICP system 200. In some implementations, the process 400 begins without the generator 208 connected. In block 402, with the generator 208 still unconnected, a network analyzer is connected to the ICP system 200 and a frequency range is set for the network analyzer. Next, in block 404, the network analyzer is calibrated. In some implementations, the process then proceeds in block 406 with the network analyzer performing a network analysis 406 without the auto-matching network 210 connected. During block 406, the network analyzer identifies the resonance points and a suitable tuning frequency range for the generator 208. After this “course” identification of the resonance points and a suitable tuning range, the network analyzer may then be used to perform a subsequent network analysis in block 408 with the auto-matching network 210 connected. With the auto-matching network 210 connected, the network analyzer can more closely identify the resonance points in block 410 and to more closely identify and define a suitable tuning frequency range for the generator 208 in block 412, including, for example, an appropriate starting frequency, an appropriate stop frequency, and tuning increments, etc.

Additionally, because the auto-matching network 210 must be able to respond to the tuning frequency of the generator 208 during the frequency tuning operation described above in block 308, the tuning frequency of the generator is limited by the response speed of the matching network 210. Thus, in some instances, the accuracy of the tuning operation may be limited by the response speed of the matching network. For example, if the tuning operation is being performed faster than the matching network can respond accurately, the frequency tuning operation can erroneously proceed in the wrong direction (e.g., away from the frequency that would achieve the lowest reflected power) and the system may, in some instances, either not recover or take significant time to recover. Thus, one or both of blocks 406 and 408 can include one or more initial iterations of one or more coarse frequency tuning operations and one or more fine tuning operations at one or more tuning speeds to determine a safe or maximum tuning speed to be used in the tuning operation 308 to ensure a suitable responsiveness of the auto-matching network 210, as well as to define a tuning range that will optimize the ability of the generator 208 and auto-matching network 210 to best match the impedance of the generator with the impedance of the load to be supplied by the generator. Generally, the boundary and other conditions will vary with the application and particular customer process recipe. Each of blocks 406 and 408 may also include one or more iterations of one or more frequency tuning operations for one or more process stages (e.g., ignition and steady-state) as well as in between process stages of various multi-step recipes.

Additionally, an intentional delay required or desired between the start of the frequency tuning operation and the start of the auto-matching tuning operation, described above with reference to process 300, also can be determined in block 414 based on, for example, the tuning operations in blocks 406 and 408. In some implementations, a starting impedance of the tuning element in the auto-matching network 210 can be determined in 416. The starting impedance also can be used for controlling the delay between the generator's frequency tuning operation and the tuning operation performed by the auto-matching network 210. For example, by selecting an appropriate starting impedance, an inherent delay associated with the starting impedance can be introduced between the frequency tuning operation and the auto-matching tuning operation. Any or all of these parameters or other information can then be provided to a user such as a customer so that they may better optimize the process 300 described above.

Another aspect of the invention is an apparatus configured to accomplish the methods described herein. A suitable apparatus includes hardware for accomplishing the process operations and a system controller having software or other computer-readable instructions for controlling process operations in accordance with the present invention. For example, the system controller may control one or more of the hardware components of ICP system 200 shown in FIG. 2. Specifically, the system controller may enable automated or user control of the generator 208, the auto-matching network 210, and other components of the ICP system 200. In some implementations, the system controller may include the controller 228 described above or, additionally or alternatively, may itself control the controller 228 described above. The system controller will typically include one or more memory devices and one or more processors configured to execute the instructions so that the hardware—such as the generator 208, auto-matching network 210, and other components of the ICP system 200—will perform a method in accordance with the present invention. Machine-readable media containing instructions for controlling process operations in accordance with the present invention may be coupled to the system controller.

As described above, the apparatus and processes described above may be used in conjunction with lithographic patterning tools or processes, for example, for the fabrication or manufacture of semiconductor devices, displays, LEDs, photovoltaic panels and the like. Typically, though not necessarily, such tools or processes will be used or conducted together in a common fabrication facility. Lithographic patterning of a film typically comprises some or all of the following steps, each step enabled with a number of possible tools: (1) application of photoresist on a workpiece, i.e., substrate, using a spin-on or spray-on tool; (2) curing of photoresist using a hot plate or furnace or UV curing tool; (3) exposing the photoresist to visible or UV or x-ray light with a tool such as a wafer stepper; (4) developing the resist so as to selectively remove resist and thereby pattern it using a tool such as a wet bench; (5) transferring the resist pattern into an underlying film or workpiece by using a dry or plasma-assisted etching tool; and (6) removing the resist using a tool such as an RF or microwave plasma resist stripper.

Although the foregoing embodiments have been described in some detail for purposes of clarity of understanding, it will be apparent that certain changes and modifications may be practiced within the scope of the appended claims. It should be noted that there are many alternative ways of implementing the processes, systems and apparatus of the present embodiments. Accordingly, the present embodiments are to be considered as illustrative and not restrictive, and the embodiments are not to be limited to the details given herein. 

What is claimed is:
 1. A system comprising: a plasma system including a reaction chamber and an induction coil around the reaction chamber, the reaction chamber housing a semiconductor substrate support pedestal; a generator configured to generate a supply signal to power the induction coil for a plasma-facilitated process; and an auto-matching network configured to receive the supply signal and to provide the supply signal to the induction coil of the plasma system; the generator further configured to detect a reflected power signal from the plasma system, and tune a frequency of the supply signal to a tuned frequency for which the power of the reflected power signal is minimized; and the auto-matching network further configured to synchronize with the generator and determine a phase and magnitude of the supply signal at the tuned frequency after the generator tunes the frequency of the supply signal to the tuned frequency, determine a phase and magnitude of a reflected power signal from the plasma system, and tune an impedance of the auto-matching network to an impedance for which the differences in the determined phases and magnitudes, respectively, of the supply signal and the reflected power signal are minimized.
 2. The system of claim 1, wherein the generator is configured to generate the supply signal in a forward power mode.
 3. The system of claim 1, wherein the supply signal is a radio frequency (RF) signal, and wherein the generator is configured to generate the supply signal at a frequency between about 300 kHz and about 1 MHz.
 4. The system of claim 3, wherein the generator is configured to tune the frequency of the supply signal within a range that starts at about 380 kHz and which stops at about 440 kHz.
 5. The system of claim 1, wherein the auto-matching network includes a phase and magnitude detector configured to: determine the phase and magnitude of the supply signal at the tuned frequency; determine the phase and magnitude of the reflected power signal from the plasma system; and generate phase and magnitude error correction signals based on the differences in the determined phases and magnitudes, respectively, of the supply signal and the reflected power signal.
 6. The system of claim 5, wherein the auto-matching network further includes a controller configured to: receive the phase and magnitude error correction signals; and generate a tuning signal based on the phase and magnitude error correction signals.
 7. The system of claim 6, wherein the auto-matching network includes at least one tuning element having an impedance based on the tuning signal.
 8. The system of claim 7, wherein the tuning element includes a variable capacitor having a capacitance based on the tuning signal.
 9. The system of claim 1, wherein the generator tunes the frequency of the supply signal to the tuned frequency and the auto-matching network tunes the impedance of the auto-matching network in real time.
 10. The system of claim 1, wherein the generator tunes the frequency of the supply signal to the tuned frequency and the auto-matching network tunes the impedance of the auto-matching network during each transition between process steps of a multi-step process.
 11. A method comprising: generating, by a generator, a supply signal to power an induction coil of a plasma system for use in a plasma-facilitated semiconductor fabrication process, wherein the plasma system includes a reaction chamber housing a semiconductor substrate support pedestal and wherein the induction coil is disposed around the reaction chamber; detecting, by the generator, a reflected power signal from the plasma system; tuning, by the generator, a frequency of the supply signal to a tuned frequency for which the power of the reflected power signal is minimized; receiving, by an auto-matching network synchronized with the generator, the supply signal at the tuned frequency; determining, by the auto-matching network, a phase and magnitude of the supply signal at the tuned frequency after the generator tunes the frequency of the supply signal to the tuned frequency; determining, by the auto-matching network, a phase and magnitude of a reflected power signal from the plasma system at the tuned frequency; and tuning, by the auto-matching network, an impedance of the auto-matching network to an impedance for which the differences in the determined phases and magnitudes of the supply signal and the reflected power signal are minimized.
 12. The method of claim 11, wherein the supply signal is generated in a forward power mode.
 13. The method of claim 11, wherein the supply signal is generated at radio frequencies (RF) between about 300 kHz and about 1 MHz.
 14. The method of claim 13, wherein the generator is configured to tune the frequency of the supply signal within a range that starts at about 380 kHz and which stops at about 440 kHz.
 15. The method of claim 11, further including generating phase and magnitude error correction signals based on the differences in the determined phases and magnitudes, respectively, of the supply signal and the reflected power signal.
 16. The method of claim 15, further including: receiving, by a controller, the phase and magnitude error correction signals; and generating, by the controller, a tuning signal based on the phase and magnitude error correction signals; and adjusting an impedance of a tuning element of the auto-matching network based on the tuning signal.
 17. The method of claim 16, wherein the adjusting the impedance of the tuning element includes adjusting the capacitance of the tuning element.
 18. The method of claim 11, wherein the frequency of the supply signal and the impedance of the auto-matching network are tuned in real time.
 19. The method of claim 11, wherein the frequency of the supply signal and the impedance of the auto-matching network are tuned during each transition between process steps of a multi-step process.
 20. The method of claim 11, further including performing a network analysis operation to identify one or more resonance points that should not be tuned to or tuned over during the tuning of the frequency of the supply signal. 